Subject:

  • Micro- and Nanotechnology

Lectures themes:

  • Introduction to Microsystems Technology
  • Nanotechnology
  • Manufacturing, structuring and characterisation of thin films                        
  • Plasma processes in microtechnical production
  • Laser technology
  • Semiconductor physics

Contact

Studiengangsleitung " Systems Engineering for Micro-Electro-Mechanical-Systems or Biomedical Micro Engineering, Master"

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